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Sputtering by particle bombardment /

Bibliographic Details
Other Authors: Behrisch, Rainer, Andersen, Hans Henrik
Format: Book
Language:English
Published: Berlin ; New York : Springer-Verlag, 1981-
Series:Topics in applied physics ; v. 47.
Topics in applied physics ; v. 52.
Topics in applied physics ; v. 64.
Subjects:
Sputtering (Physics)
Solids > Effect of radiation on.
Surfaces (Physics) > Effect of radiation on.

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