Cover Image

Ion implantation, sputtering and their applications /

Bibliographic Details
Main Author: Townsend, P. D. (Peter David)
Other Authors: Kelly, J. C. (John Clive), Hartley, N. E. W.
Format: Book
Language:English
Published: London ; New York : Academic Press, 1976.
Subjects:
Ion implantation.
Sputtering (Physics)
Description
Physical Description:ix, 333 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and index.
ISBN:0126969507