Ion implantation, sputtering and their applications /

Bibliographic Details

Main Author:	Townsend, P. D. (Peter David)
Other Authors:	Kelly, J. C. (John Clive), Hartley, N. E. W.
Format:	Book
Language:	English
Published:	London ; New York : Academic Press, 1976.
Subjects:	Ion implantation. Sputtering (Physics)