APA (7th ed.) Citation

Townsend, P. D., Kelly, J. C., & Hartley, N. E. W. (1976). Ion implantation, sputtering and their applications. Academic Press.

Chicago Style (17th ed.) Citation

Townsend, P. D., J. C. Kelly, and N. E. W. Hartley. Ion Implantation, Sputtering and Their Applications. London ; New York: Academic Press, 1976.

MLA (9th ed.) Citation

Townsend, P. D., et al. Ion Implantation, Sputtering and Their Applications. Academic Press, 1976.