APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & Blais, P. D. (1987). Electron-beam, x-ray, and ion-beam lithographies VI: 5-6 March 1987, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Phillip D. Blais. Electron-beam, X-ray, and Ion-beam Lithographies VI: 5-6 March 1987, Santa Clara, California. Bellingham, Wash.: SPIE--the International Society for Optical Engineering, 1987.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Phillip D. Blais. Electron-beam, X-ray, and Ion-beam Lithographies VI: 5-6 March 1987, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1987.