Cover Image

Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Monahan, Kevin M.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--The International Society for Optical Engineering, [1987]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 775.
Subjects:
Integrated circuits > Congresses.
Measurement > Congresses.
Description
Physical Description:vi, 329 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and author index.
ISBN:0892528109 (pbk.)