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Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Monahan, Kevin M.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--The International Society for Optical Engineering, [1987]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 775.
Subjects:
Integrated circuits > Congresses.
Measurement > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7874 .I543 1987
 
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TK7874 .I543 1987 Available