APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & Monahan, K. M. (1987). Integrated circuit metrology, inspection, and process control: 4-6 March 1987, Santa Clara, California. SPIE--The International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Kevin M. Monahan. Integrated Circuit Metrology, Inspection, and Process Control: 4-6 March 1987, Santa Clara, California. Bellingham, Wash.: SPIE--The International Society for Optical Engineering, 1987.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Kevin M. Monahan. Integrated Circuit Metrology, Inspection, and Process Control: 4-6 March 1987, Santa Clara, California. SPIE--The International Society for Optical Engineering, 1987.