Cover Image

Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Metallurgical Society (U.S.)
Other Authors: Glembocki, O. J., Pollak, Fred H., Song, Jin-Joo
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--The International Society for Optical Engineering, [1987]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 794.
Subjects:
Spectrum analysis > Congresses.
Semiconductors > Testing > Congresses.
Raman spectroscopy > Congresses.
Description
Physical Description:vi, 282 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:089252829X (pbk.)