APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Metallurgical Society (U.S.), Glembocki, O. J., Pollak, F. H., & Song, J. (1987). Modern optical characterization techniques for semiconductors and semiconductor devices: 26-27 March 1987, Bay Point, Florida. SPIE--The International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Metallurgical Society (U.S.), O. J. Glembocki, Fred H. Pollak, and Jin-Joo Song. Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices: 26-27 March 1987, Bay Point, Florida. Bellingham, Wash.: SPIE--The International Society for Optical Engineering, 1987.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices: 26-27 March 1987, Bay Point, Florida. SPIE--The International Society for Optical Engineering, 1987.