Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands /
| Corporate Authors: | , , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1987]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 803. |
| Subjects: |
| Item Description: | Papers delivered at a meeting held within the framework of the Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, Hague, 30 Mar. to 3 Apr., 1987. |
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| Physical Description: | viii, 159 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0892528389 (pbk.) 9780892528387 (pbk.) |