Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands /

Bibliographic Details
Corporate Authors:	Association nationale de la recherche technique, Society of Photo-optical Instrumentation Engineers, International Symposium on Optical and Optoelectronic Applied Sciences and Engineering
Other Authors:	Weck, Manfred, 1937-
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1987]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 803.
Subjects:	Micromachining > Congresses. Optical instruments > Design and construction > Congresses.

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