Optical microlithography VI : 4-5 March 1987, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Stover, Harry L.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 772.
Subjects:	Microlithography > Congresses. Integrated circuits > Very large scale integration > Congresses.

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