Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
[1985]
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| Series: | Materials Research Society symposia proceedings ;
v. 38. |
| Subjects: |
| Item Description: | Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984. |
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| Physical Description: | xv, 522 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographies and indexes. |
| ISBN: | 0931837030 : |