Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author:	Symposium on Plasma Synthesis and Etching of Electronic Materials
Other Authors:	Chang, R. P. H. (Robert Pang Heng), 1941-, Abeles, B.
Format:	Conference Proceeding Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1985]
Series:	Materials Research Society symposia proceedings ; v. 38.
Subjects:	Plasma engineering > Congresses. Plasma etching > Congresses. Electronics > Materials > Congresses.

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