Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposium on Impurity Diffusion and Gettering in Semiconductors
Other Authors:	Fair, Richard B., Pearce, Charles W., Washburn, Jack, 1921-
Format:	Conference Proceeding Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1985]
Series:	Materials Research Society symposia proceedings. v. 36.
Subjects:	Semiconductors > Defects > Congresses. Diffusion > Congresses. Semiconductor doping > Congresses. Getters > Congresses.

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