Silicon-on-insulator : its technology and applications /

Bibliographic Details
Corporate Authors:	National Science Foundation (U.S.), Nihon Gakujutsu Shinkōkai, US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics"
Other Authors:	Furukawa, S. (Seijirō), 1934-
Format:	Conference Proceeding Book
Language:	English
Published:	Tokyo : Boston : KTK Scientific Publishers ; D. Reidel ; [1985]
Subjects:	Solid state electronics > Congresses. Integrated circuits > Design and construction > Congresses. Silicon > Congresses. Epitaxy > Congresses.

Description
Item Description:	"Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--P. 5. Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics. "ASST, advances in solid state technology"--Cover.
Physical Description:	viii, 295 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	9027719403