Silicon-on-insulator : its technology and applications /

Bibliographic Details
Corporate Authors:	National Science Foundation (U.S.), Nihon Gakujutsu Shinkōkai, US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics"
Other Authors:	Furukawa, S. (Seijirō), 1934-
Format:	Conference Proceeding Book
Language:	English
Published:	Tokyo : Boston : KTK Scientific Publishers ; D. Reidel ; [1985]
Subjects:	Solid state electronics > Congresses. Integrated circuits > Design and construction > Congresses. Silicon > Congresses. Epitaxy > Congresses.

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