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Methods and materials in microelectronic technology /

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Bibliographic Details
Corporate Author: International Symposium on Methods and Materials in Microelectronic Technology Bad Neuenahr-Ahrweiler, Germany
Other Authors: Bargon, Joachim
Format: Conference Proceeding Book
Language:English
Published: New York : Plenum Press, [1984]
Series:IBM research symposia series.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Photolithography > Congresses.
Ion beam lithography > Congresses.
X-ray lithography > Congresses.
Description
Item Description:"Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--Title page verso.
Physical Description:viii, 367 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographies and index.
ISBN:0306418037