Methods and materials in microelectronic technology /

Bibliographic Details
Corporate Author:	International Symposium on Methods and Materials in Microelectronic Technology Bad Neuenahr-Ahrweiler, Germany
Other Authors:	Bargon, Joachim
Format:	Conference Proceeding Book
Language:	English
Published:	New York : Plenum Press, [1984]
Series:	IBM research symposia series.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses. Photolithography > Congresses. Ion beam lithography > Congresses. X-ray lithography > Congresses.

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