Thin film and depth profile analysis /

Bibliographic Details
Other Authors:	Oechsner, H. (Hans), 1934-, Etzkorn, H. W.
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer-Verlag, 1984.
Series:	Topics in current physics ; 37.
Subjects:	Thin films > Surfaces. Surface chemistry. Sputtering (Physics)

Description
Physical Description:	xi, 205 pages : illustrations
Bibliography:	Includes bibliographical references and index.
ISBN:	0387133208 (U.S.)