Thin film and depth profile analysis /

Bibliographic Details
Other Authors:	Oechsner, H. (Hans), 1934-, Etzkorn, H. W.
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer-Verlag, 1984.
Series:	Topics in current physics ; 37.
Subjects:	Thin films > Surfaces. Surface chemistry. Sputtering (Physics)

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