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Materials for microlithography : radiation-sensitive polymers /

Bibliographic Details
Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Division of Polymer Chemistry, American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Fréchet, Jean M. J.
Format: Book
Language:English
Published: Washington, D.C. : The Society, 1984.
Series:ACS symposium series ; 266.
Subjects:
Polymerization > Congresses.
Photoresists > Congresses.
Lithography > Congresses.
Microelectronics > Materials > Congresses.
Polymers > Congresses.
Description
Physical Description:viii, 494 pages : illustrations
Bibliography:Includes bibliographical references and indexes.
ISBN:0841208719
ISSN:0097-6156 ;