Materials for microlithography : radiation-sensitive polymers /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Division of Polymer Chemistry, American Chemical Society. Meeting
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Fréchet, Jean M. J.
Format:	Book
Language:	English
Published:	Washington, D.C. : The Society, 1984.
Series:	ACS symposium series ; 266.
Subjects:	Polymerization > Congresses. Photoresists > Congresses. Lithography > Congresses. Microelectronics > Materials > Congresses. Polymers > Congresses.

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