Advanced semiconductor processing and characterization of electronic and optical materials /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, American Vacuum Society. Electronic Materials and Process Division
Other Authors:	Sadana, Devendra K., Lampert, Carl M.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE--The International Society for Optical Engineerng, 1984.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 463.
Subjects:	Semiconductors > Congresses. Electronics > Materials > Congresses. Optical materials > Congresses.

Remote Storage