Cover Image

Transmission electron microscopy of silicon VLSI circuits and structures /

Bibliographic Details
Main Author: Marcus, R. B. (Robert B.)
Other Authors: Sheng, T. T. (Tai Tsu)
Format: Book
Language:English
Published: New York : Wiley, [1983]
Subjects:
Integrated circuits.
Electron microscopy.
Transmission electron microscopes.
Description
Item Description:"A Wiley-Interscience publication."
Physical Description:x, 217 pages : illustrations ; 29 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471092517 :