Transmission electron microscopy of silicon VLSI circuits and structures /

Bibliographic Details

Main Author:	Marcus, R. B. (Robert B.)
Other Authors:	Sheng, T. T. (Tai Tsu)
Format:	Book
Language:	English
Published:	New York : Wiley, [1983]
Subjects:	Integrated circuits. Electron microscopy. Transmission electron microscopes.