Silicon processing : a symposium /

Bibliographic Details
Corporate Authors:	ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Stanford University, Symposium on Silicon Processing
Other Authors:	Gupta, D. C. (Dinesh C.)
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, Pa. : ASTM, [1983]
Series:	ASTM special technical publication ; 804.
Subjects:	Silicon > Congresses. Semiconductors > Congresses.

Description
Item Description:	Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982. "ASTM publication code number (PCN) 04-804000-46."
Physical Description:	559 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references and index.