Silicon processing : a symposium /

Bibliographic Details
Corporate Authors:	ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Stanford University, Symposium on Silicon Processing
Other Authors:	Gupta, D. C. (Dinesh C.)
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, Pa. : ASTM, [1983]
Series:	ASTM special technical publication ; 804.
Subjects:	Silicon > Congresses. Semiconductors > Congresses.

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