Cover Image

Ion implantation /

Bibliographic Details
Main Author: Ryssel, Heiner, 1941-
Other Authors: Ruge, Ingolf
Format: Book
Language:English
German
Published: Chichester [West Sussex] ; New York : Wiley, [1986]
Series:"A Wiley-Interscience publication."
Subjects:
Ion implantation.
Semiconductors.
Description
Item Description:Translation of: Ionenimplantation.
Includes index.
Physical Description:xvii, 459 pages : illustrations
Bibliography:Bibliograaphy: pages 429-453.
ISBN:047110311X :