Ion implantation /

Bibliographic Details
Main Author:	Ryssel, Heiner, 1941-
Other Authors:	Ruge, Ingolf
Format:	Book
Language:	English German
Published:	Chichester [West Sussex] ; New York : Wiley, [1986]
Series:	"A Wiley-Interscience publication."
Subjects:	Ion implantation. Semiconductors.

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