Emerging semiconductor technology : a symposium /

Bibliographic Details
Corporate Authors:	ASTM Committee F-1 on Electronics, Symposium on Semiconductor Processing
Other Authors:	Gupta, D. C. (Dinesh C.), Langer, Paul H.
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, PA : American Society for Testing and Materials, [1987]
Series:	ASTM special technical publication ; 960.
Subjects:	Semiconductor industry > Congresses. Semiconductors > Design and construction > Congresses.

Description
Item Description:	Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46."
Physical Description:	704 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	0803104596