Emerging semiconductor technology : a symposium /

Bibliographic Details
Corporate Authors:	ASTM Committee F-1 on Electronics, Symposium on Semiconductor Processing
Other Authors:	Gupta, D. C. (Dinesh C.), Langer, Paul H.
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, PA : American Society for Testing and Materials, [1987]
Series:	ASTM special technical publication ; 960.
Subjects:	Semiconductor industry > Congresses. Semiconductors > Design and construction > Congresses.

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