Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Coburn, J. W., 1932-, Gottscho, R. A., Hess, Dennis W.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1986]
Series:	Materials Research Society symposia proceedings. v. 68.
Subjects:	Plasma engineering > Congresses.

Description
Physical Description:	xvii, 463 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	0931837340 :
ISSN:	0272-9172 ;