Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Coburn, J. W., 1932-, Gottscho, R. A., Hess, Dennis W.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1986]
Series:	Materials Research Society symposia proceedings. v. 68.
Subjects:	Plasma engineering > Congresses.

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