Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Blais, Phillip D.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1986]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 632.
Subjects:	X-ray lithography > Congresses. Lithography, Electron beam > Congresses. Ion beam lithography > Congresses.

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