Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, USA /

Bibliographic Details
Other Authors:	Sedgwick, Thomas O., Seidel, Thomas E., Tsaur, Bor-Yeu
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials, Research Society, [1986]
Series:	Materials Research Society symposia proceedings. v. 52.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses.

Description
Physical Description:	xiv, 484 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0931837170 :
ISSN:	0272-9172 ;