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Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, USA /

Bibliographic Details
Other Authors: Sedgwick, Thomas O., Seidel, Thomas E., Tsaur, Bor-Yeu
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials, Research Society, [1986]
Series:Materials Research Society symposia proceedings. v. 52.
Subjects:
Semiconductors > Heat treatment > Congresses.
Semiconductor doping > Congresses.

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Holdings details from Remote Storage
Call Number: TK7871.85 .R35 1986
 
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TK7871.85 .R35 1986 Available