Microelectronics processing : inorganic materials characterization /

Bibliographic Details
Corporate Author:	American Chemical Society. Division of Industrial and Engineering Chemistry
Other Authors:	Casper, L. A.
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1986.
Series:	ACS symposium series ; 295.
Subjects:	Microelectronics > Materials > Congresses.

Description
Physical Description:	x, 443 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	0841209340
ISSN:	0097-6156 ;