Microelectronics processing : inorganic materials characterization /

Bibliographic Details
Corporate Author:	American Chemical Society. Division of Industrial and Engineering Chemistry
Other Authors:	Casper, L. A.
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1986.
Series:	ACS symposium series ; 295.
Subjects:	Microelectronics > Materials > Congresses.

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