| Tag |
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| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00000390821 |
| 005 |
20151011114229.0 |
| 008 |
850816s1985 waua b 10100 eng d |
| 010 |
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|a 85061232
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| 020 |
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|a 0892525738 (pbk.)
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| 035 |
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|a (OCoLC)12395158
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| 035 |
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|9 ABS0291AM
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| 040 |
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|a LHL
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|d CLU
|d TXA
|d UtOrBLW
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| 049 |
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|a TXAM
|c [A09177267]
|
| 090 |
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|a TR940
|b .O69 1985
|
| 245 |
0 |
0 |
|a Optical microlithography IV :
|b March 13-14, 1985, Santa Clara, California /
|c Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
|
| 264 |
|
1 |
|a Bellingham, Wash., USA :
|b SPIE--the International Society for Optical Engineering,
|c [1985]
|
| 264 |
|
4 |
|c ©1985
|
| 300 |
|
|
|a vi, 260 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings of SPIE--The International Society for Optical Engineering ;
|v v. 538
|
| 504 |
|
|
|a Includes bibliographies and index.
|
| 650 |
|
0 |
|a Photolithography
|x Congresses.
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|v Congresses.
|
| 700 |
1 |
|
|a Stover, Harry L.
|
| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers.
|
| 710 |
2 |
|
|a International Society for Hybrid Microelectronics.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 538.
|
| 999 |
|
|
|a MARS
|
| 999 |
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| 952 |
f |
f |
|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
|t 0
|e TR940 .O69 1985
|h Library of Congress classification
|i unmediated -- volume
|m A14809177267
|
| 998 |
f |
f |
|a TR940 .O69 1985
|t 0
|l Remote Storage
|