Optical microlithography IV : March 13-14, 1985, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, International Society for Hybrid Microelectronics
Other Authors:	Stover, Harry L.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1985]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 538.
Subjects:	Photolithography > Congresses. Integrated circuits > Very large scale integration > Congresses.

Remote Storage