APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, International Society for Hybrid Microelectronics, & Stover, H. L. (1985). Optical microlithography IV: March 13-14, 1985, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, International Society for Hybrid Microelectronics, and Harry L. Stover. Optical Microlithography IV: March 13-14, 1985, Santa Clara, California. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1985.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Optical Microlithography IV: March 13-14, 1985, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1985.