Integrated circuits : chemical and physical processing : developed from the winter symposium /

Bibliographic Details
Corporate Author:	American Chemical Society. Division of Industrial and Engineering Chemistry
Other Authors:	Stroeve, Pieter, 1945-
Format:	Book
Language:	English
Published:	Washington, D.C. : American Chemical Society, 1985.
Series:	ACS symposium series ; 290.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses.

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