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Integrated circuit metrology : May 4-5, 1982, Arlington, Virginia /

Bibliographic Details
Corporate Author: United States. National Bureau of Standards
Other Authors: Nyyssonen, Diana
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--the International Society for Optical Engineering, [1982]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 342.
Subjects:
Integrated circuits > Congresses.
Measurement > Congresses.
Description
Physical Description:vi, 132 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0892523778 (pbk.)