Integrated circuit metrology : May 4-5, 1982, Arlington, Virginia /

Bibliographic Details
Corporate Author:	United States. National Bureau of Standards
Other Authors:	Nyyssonen, Diana
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE--the International Society for Optical Engineering, [1982]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 342.
Subjects:	Integrated circuits > Congresses. Measurement > Congresses.

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