Ion implantation techniques : lectures given at the Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 /

Bibliographic Details

Corporate Authors:	Ion Implantation School Berchtesgaden, Germany, International Conference on Ion Implantation: Equipment and Techniques
Other Authors:	Ryssel, Heiner, 1941-, Glawischnig, H. (Hans), 1939-
Format:	Conference Proceeding Book
Language:	English
Published:	Berlin ; New York : Springer-Verlag, 1982.
Series:	Springer series in electrophysics ; v. 10.
Subjects:	Ion implantation. Semiconductor doping.