Bibliographic Details
| Corporate Authors: |
International Conference on Chemical Vapor Deposition Atlanta, Ga.,
Electrochemical Society. Electrothermics and Metallurgy Division,
Electrochemical Society. Electronics Division,
Electrochemical Society. Dielectrics and Insulation Division |
| Other Authors: |
Donaghey, Lee F.,
Rai-Choudhury, P.,
Tauber, Richard N. |
| Format: | Conference Proceeding
Book
|
| Language: | English |
| Published: |
Princeton, N.J. :
Electrochemical Society,
[1977]
|
| Series: | Proceedings (Electrochemical Society) ;
v. 77-5.
|
| Subjects: | |