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Silicon nitride for microelectronic applications /

Bibliographic Details
Main Author: Milek, John T. (John Theophil), 1915-1976
Format: Book
Language:English
Published: New York : IFI/Plenum, 1971-
Series:Handbook of electronic materials ; v. 3, 6.
Subjects:
Silicon nitride.
Microelectronics.
Dielectrics.

Remote Storage

Holdings details from Remote Storage
Call Number: TK3441.S46 M54
Library Owns: TK3441.S46 M54 (v.1-v.2)
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TK3441.S46 M54 v.1 Available
TK3441.S46 M54 v.2 Available