Ion beams : with applications to ion implantation /

Bibliographic Details

Main Author:	Wilson, Robert G.
Other Authors:	Brewer, George Raymond, 1922-
Format:	Book
Language:	English
Published:	Malabar, Fl : R.E. Krieger Pub. Co., 1979.
Edition:	Reprint ed. with corrections.
Subjects:	Ion implantation. Semiconductors. Microelectronics.